A Novel Model for Surface Evolvement and Footing Effect Simulations in DRIE Fabrications

A novel model for surface evolvement and footing effect simulations in ICP DRIE fabrications is reported, which is based on time multiplexed deep etching (TMDE). It couples the advanced plasma sheath approximation and has the simplex data structure due to 2-D string algorithm. Furthermore, the model has the ability to simulate the footing effect if some reasonable descriptions for footing surface are assumed. The simulation results are in agreement with the experiments.