Preparation and Characterization of Microhotplate for Gas Sensors

In this work, we describe preparation and characterization of microhotplate for gas sensor structures. The microhotplate was prepared by DC magnetron sputtering using a TiN/Pt double layer. Measuring of electrical parameters demonstrated the structure to have linear I-V characteristic and resistance of 63Omega. The electrothermal characterization showed good linearity of the microhotplate at temperatures below 220degC. Temperature dependent measuring of different samples displayed influence of membrane thickness on self-heating process. According to these measurements, we could deduce some optimizations in design and fabrication process of the sensor structure