An Electromagnetic MEMS Actuator for Micropumps

In this paper, design, fabrication and evaluation of an electromagnetic MEMS micropump actuator are reported. Based on MEMS technology, the proposed micropump actuator is designed and fabricated using integrated surface and bulk micromachining at the Microfabrication Facility at the Rochester Institute of Technology. A thin silicon diaphragm with a planar spiral coil ensures the desired degree of robustness and guarantees the specified volumetric changes. The magnetic force is generated due to the interaction between the magnetic field of a permanent magnet and current in the coil. The experimental results are reported