I. Introduction
In Recent Years, magnetically levitated planar actuators have been developed as an alternative to -drives constructed of stacked linear actuators. Although the translator of these actuators can move over relatively large distances in the -plane only, it has to be controlled in six degrees-of-freedom (DOFs) because of the active magnetic bearing. These actuators have either moving coils and stationary magnets [1] or moving magnets and stationary coils [2], [3]. The coils in the actuator are simultaneously used for propulsion in the -plane as well as for the four-DOF active magnetic bearing. To integrate the long-stroke propulsion and the active magnetic bearing of a moving-magnet actuator, new design [4] and control methods [5] have been developed.