Fabrication and Characteristics of Radial Position Sensitive Detectors

The paper discusses the fabrication and performance of radial position sensitive detectors, These detectors are made on n-type annular silicon wafers using boron implantation to form the resistive layer for charge division and for the junction. Aluminum is evaporated on the opposite side for the back contact. The detectors so obtained have typical position resolution of 0.6 mm and integral nonlinearity of better than 0.1% for 7 mm