A PIG Sputter Source for Negative Ions

A PIG discharge with radial extraction and a separate sputtering cathode placed opposite to the outlet has been built. To increase the yield of negatively sputtered ions, cesium is vapourized into the discharge. Magnetically analyzed spectra of the extracted beams prove, together with other evidence, that the extracted ions are those directly sputtered. Among others, the following analyzed beams have been obtained: C- - 7 μA, F- - 15 μA, Al- - 1 μA Al-2 - 2.0 μA, Cl- - 30 μA, Ta- -3 μA, and Au- - 59 μA. With 10 μA injected into our tandem accelerator, a 2.4 μA Au++ beam was obtained.