A Compact Pulser for Radio Frequency Ion Sources

A simple and efficient transistorized pulser for pulsing the r.f. power supplied to ion sources is described. The pulsing transistor is off during tho quiescent period and no pulse transformers are used. Accurately timed r.f. pulses of 600W peak power are obtained and the pulser consumes about W. Pulse durations in the range 1 μsec - 10 msec at duty cycles of up to 0.5 are achieved. Time jitter is less than 10 nsec and can be reduced to 1 nsec by using stabilized supply voltages. This is the first time in which transistors are used in pulsing such high power r.f. ion sources with reasonably high timing accuracy. Criteria for switching the highest r.f. power from a given pulser are given.