Influence of Sputtering Gas Pressure on High-Frequency Soft Magnetic Properties of FeCoN Thin Film

In this paper, the influences of sputtering gas pressure on the high-frequency soft magnetic properties of FeCoN thin films are investigated. Both the static soft magnetic properties and microwave characteristics of FeCoN thin films are found to be highly dependent on the pressure. The high-frequency magnetic properties are characterized with permeability spectra and discussed based on the Landau-Lifshitz-Gilbert equation. The damping factor changes with sputtering gas pressure, and the resonance frequency shows an extraordinary large tunability with sputtering gas pressure. The effects are suggested to be related to the film stress which is affected by the sputtering pressure. This work provides a convenient method to tune the high-frequency magnetic properties of FeCoN film.