I. Introduction
Perpendicular recording has been demonstrated to achieve areal density beyond 100 Gb/in2 for the next-generation products. Oxygen-doped magnetic alloys such as CoPtCrO have been reported to have small grains with good magnetic decoupling and thermal stability for perpendicular recording media [1], [2]. However, fabrication of well-isolated Co grains with high anisotropy in CoPtCrO media is still a challenge because grain size as well as grain boundary segregation is highly dependent on oxidation that often incorporates into the Co grain, resulting in reduced anisotropy [1]. Moreover, variations in grain boundary segregation in CoPtCrO media will result in a distribution of exchange fields and magnetic cluster size, which increases transition jitter.