High-Throughput Fabrication of Nanoelectrodes on Polymer using Nanoinjection and Trench-Filling Techniques

In this paper, high throughput fabrication of nanoelectrodes on polymer using nanoinjection and trench-filling techniques is developed and results are presented. The new fabrication method for producing nanoelectrodes on polymer substrates is characterized with scanning electron microscopy, surface profilometry, and atomic force microscopy. This method may be applied to mass-production of low-cost polymer biochips containing ultra-sensitive nanoelectrodes for biosensors in point-of-care medicine.