MEMS based conductivity-temperature-depth (CTD) sensor for harsh oceanic environment

A MEMS based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor (C), gold doped silicon temperature sensor (T), a multiple diaphragm piezoresistive pressure sensor (D). The sensor elements have further been packaged to protect them from harsh marine environment. This paper provides the design, fabrication and initial test results on a prototype CTD sensor