Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches

This paper reports on the design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches. First the electromechanical design and simulation of simple cantilever and fixed-fixed ends type MEMS switches is presented, and the effect of electrostatic area and its location on the switching voltage is investigated. Then the governing equations for spring-constant of varying section cantilever and fixed-fixed end types MEMS switches is derived by energy method and Euler-Bernoulli theory. The switching voltage of mentioned constructions for MEMS switches is determined by design and simulation methods and the results of these methods are compared.