CPW on silicon substrates: propagation constant modeling and substrate free carriers contribution

We present a mixed approach associating Drude's and Heinrich's models for the modelling of attenuation and dispersion of coplanar waveguides. We investigate both single- and multi-layered substrates for which our approach is in good agreement with measurements. In the case of single-layered substrates, no adjustable parameter is required and we validate the model for both high and low resistivity silicon substrates.