Characterization of P-Type Cr:TiO2 Gas Sensor

Thin films of Cr-doped TiO
₂
have been deposited by RF magnetron sputtering, using for the first time a Ti target with a different numbers of Cr inserts. The influence of the Cr content and the annealing treatments upon the structure and the electrical conductivity of thin films have been investigated. The sensing behavior of selected series of samples has been tested to different gases like CO, NO
₂
and ethanol. P-type conductivity and sensing behavior has been obtained with an enhancement in the sensing performances of titania doped layers