RF-MEMS capacitive series switches of CPW and MSL configurations for reconfigurable antenna application

The air-bridged RF-MEMS switches in single pole single throw (SPST) transmission lines are presented for reconfigurable antenna application. The RF characteristics of capacitive series switches are analyzed, measured, and compared with microstrip line (MSL) and coplanar waveguide (CPW) structures. RF-MEMS series switches are monolithic fabricated in both transmission line structures on glass substrate of dielectric constant, /spl epsiv//sub r/ = 7.4. The reconfigurable multibeam spiral antenna (f/sub o/ = 11 GHz), which is monolithic integrated with RF-MEMS capacitive series switches on the same glass substrates is also presented as an example of the use of in-line MEMS series switches for reconfigurable antenna applications.