A new embedded NVM technology for low-power, high temperature, rad-hard applications

A new non-volatile memory technology, Nanomech/spl trade/, for embedded applications is described. The technology is based on the use of a cantilever device for one-time as well as multi-time programmable storage functions. The device is sub-micron, is integrated into standard CMOS and is programmed electro-statically (ultra low-power). It is, due to its mechanical character, insensitive to radiation and high-temperature. In addition, the device is programmable at native voltage level making it highly efficient for embedded storage.