A Simulation Strategy For Process Optimization

This paper presents an integrated process and device simulation framework aimed at optimizing the process parameters in view of a set of desired electrical performances. In addition the process design is driven in a direction as to minimize the sensitivity of the electrical performance characteristics towards process variations and/or fluctuations. The techniques used for achieving the objectives of the framework are based on Design of Experiments (DOE), Response Surface Methodology (RSM), and Target Oriented Design (TOD).