Thermally Controlled Magnetization Microrelay

A novel micro-mechanical relay using a thermally controlled magnetization actuator has been developed. The actuator is actuated by heating it with integrated titanium film heaters which changes its local magnetization, thus realizing a simple structure without an electromagnetic coil. The microrelay uses installed permanent magnets to achieve self-latching. It was fabricated by nickel electroplating; its estimated generated force is about 60 /spl mu/N. The heating time needed to reduce its magnetization is less than 10 milli-seconds, so the switching speed is comparable to that of a conventional mechanical relay.