Integrated-optic 1*128 power splitter with multifunnel waveguide

An integrated-optic 1*128 power splitter is demonstrated. It is composed of a slab waveguide, funnel-shaped waveguides, and output waveguides. Input light from a fiber is diffracted in the slab waveguide and received by funnel waveguides. To achieve uniform power splitting, the width of the funnel waveguides is designed based on the Gaussian diffraction pattern; that is the funnel widths increase progressively away from the center. The splitter is fabricated with GeO/sub 2/-doped silica waveguides on silicon. The 1*128 splitting is achieved with a low excess loss of 2.3 dB and a small standard deviation of 0.63 dB.<>