MEMS on bulk mechanical contour substrates

We have fabricated MEMS structures directly onto non-silicon bulk cylindrical substrates with minimum linewidth resolution better than 5 /spl mu/m. Simple sacrificially released metal structures were realized on a 1.25" diameter, 2" long cylinder surface which demonstrated our alignment process for making multiple layers of thin film micro-structures. We have also initiated work to fabricate MEMS sensors and actuators onto bulk cylindrical substrates and the preliminary results are presented in this paper.