A linear stepping actuator in surface micromachining technology for low voltages and large displacements

This paper reports on a surface micromachined linear stepping motor for low voltages between 15-30 V, using the attractive electrostatic forces between the drive electrodes. The maximum stepping width is 3 /spl mu/m. Two types of actuators have been designed, fabricated and successfully tested, yielding accurate displacements of more than 100 /spl mu/m.