Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys

This paper reports the first realization of surface micromachined, suspended structures, made of poly crystalline silicon germanium alloys (poly Si/sub 0.7/Ge/sub 0.3/). The electrical and mechanical properties of this material are presented. The effect of the deposition conditions on the above properties is also investigated. The complete process for realizing the suspended structure is described and the possibility of reducing the process temperature down to 650/spl deg/C is demonstrated.