Luminescent properties of sol-gel prepared Y/sub 3/Al/sub 5/O/sub 12/:Tb thin films

A series of Tb-activated Y/sub 3/Al/sub 5/O/sub 12/ films have been fabricated by spin coating on silicon substrate with sol-gel solutions. The formation of a single garnet phase is observed at 800/spl deg/C for 1 h in rapid thermal annealing furnace. The emission spectrum of the films induced by ultraviolet (UV) and electron excitations show the /sup 5/D to /sup 6/F transition and consisted of two groups, /sup 5/D/sub 3/ to /sup 6/F (before 485 nm) and /sup 5/D/sub 4/ to /sup 6/F (after 485 nm). The emission intensities of the films are dependent on the Tb concentrations.