Micromanipulation using a microcoil array

A method of micromanipulation using a microcoil array is proposed. Active coils drive permanent magnets on a work platform. The magnets can push mechanical parts to perform 2-dimensional assembly. Three-dimensional operation may be achieved from 2D magnet motion when the permanent magnets are part of a closed loop spatial linkage. Manipulation on a 4 cm/spl times/4 cm coil array was tested. Based on this large scale experiment, we fabricated a microcoil array using IC-based processes. A 4/spl times/4 microcoil array with 8 turns per coil was fabricated. The chip area including bonding pads, is 3.6 mm/spl times/3.6 mm. The minimum current necessary to attract a magnet and its speed were evaluated. A 0.6 mm/spl times/0.6 mm/spl times/0.3 mm magnet moved at 79 mm/s. The top speed for a magnet to follow a square trajectory was evaluated, and it was demonstrated that a 1.1 mg magnet could push a 13.4 mg object out of microcoil array.