Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions

The development of a first implementation of the MEMCAD system (version 1.0) is reported. The system is composed of three commercial mechanical CAD software packages integrated with specialized structure generation and electrostatic analysis programs. The authors describe the system and demonstrate its capabilities using a comb drive example constructed directly from a CIH description of its mask set. The analysis of the comb drive, all the way from generating a full 3-D model from mask descriptions to calculating comb levitation forces, takes just a few hours.<
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