An integrated optoelectronic CO/sub 2/ gas sensor

A novel CO/sub 2/ sensor has been demonstrated that employs micromachined structures to produce a device that can be mass-produced with a high degree of integration of optoelectronic and chemical components. The sensor is designed to operate in a self-referencing mode that greatly minimizes short and long term drift of sensor response. Preliminary devices have been tested and exhibit a near-linear processed output over the range from 0 to 140 torr ambient CO/sub 2/.<
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