Surface micrometrology using ultrasound

The development of ultrasonic scattering and reflection techniques for the online measurement of machined part surface features is described. A range of ultrasonic frequencies and beam dimensions was supplied to shaped and turned sample surfaces, using both scattering and profiling techniques. It is demonstrated that it is feasible for pulsed ultrasound to resolve average roughness values and discrete asperities of less than 1 mu m.<
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