Abstract:
A precision digital edge-line-detection method is presented that was developed for extracting edge contours of resist lines of submicrometer width as imaged by scanning e...Show MoreMetadata
Abstract:
A precision digital edge-line-detection method is presented that was developed for extracting edge contours of resist lines of submicrometer width as imaged by scanning electron microscopy, as a means of inspection in integrated circuit fabrication. The method is based on a modification of the Hough transform.<>
Published in: IEEE Transactions on Pattern Analysis and Machine Intelligence ( Volume: 10, Issue: 1, January 1988)
DOI: 10.1109/34.3875
