Dose rate laser simulation tests adequacy: shadowing and high intensity effects analysis

The adequacy of laser based simulation of the flash X-ray effects in microcircuits may be corrupted mainly due to laser radiation shadowing by the metallization and the non-linear absorption in a high intensity range. The numerical joint solution of the optical equations and the fundamental system of equations in a two-dimensional approximation were performed to adjust the application range of laser simulation. As a result the equivalent dose rate to laser intensity correspondence was established taking into account the shadowing as well as the high intensity effects. The simulation adequacy was verified in the range up to 4/spl middot/10/sup 11/ rad(Si)/s with the comparative laser test of a specially designed test structure.