X-radiation response of SIMOX buried oxides: influence of the fabrication process

X-ray induced electron and hole trapping properties have been investigated in SIMOX buried oxides of different processes, including standard and supplemental implantation oxides, as well as new thin and ultra-thin oxides. The effect of the substrate bias applied during irradiation is studied, and then used to extract both hole and electron trapping parameters. The results demonstrate that varying the oxygen implantation conditions has very little effect on the radiation induced behavior of the material. They show that the charge trapping properties of the buried oxide are related to the ultra high temperature anneal performed on the confined oxide layer, and confirm that the post implantation anneal is the most critical part of the SIMOX process.