Analysis of 3-D metallization structures by a full-wave spectral-domain technique

A full-wave method for the investigation of microstrip and coplanar structures including 3-D metallization structures is presented. The spectral-domain analysis method is used to calculate the S-parameters of unshielded microwave components containing bond-wires and air-bridges. The general formulation and the implementation procedure of the method are described. The application of the theory is given by a comparison of measured and calculated results for a spiral inductor, including an air-bridge.<
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