3-D computer aided analysis of the "Berkeley" electrostatic micromotor

The basic ideas of IC-processed electrostatics are reviewed. The three-dimensional field model of a variable-capacitance electrostatic micromotor is then presented and the underlying analysis problem is solved by means of the finite element method. The micromotor, acting as a position actuator, is investigated at steady state and particular attention is paid in the calculation of the torque-angle curve featuring the device. The influence of stator geometry on the electromechanical performance is also investigated and design considerations are accordingly drawn. Finally, the step-transient response of the actuator is simulated.<
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