In situ preparation of Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-x/ thin films deposited by ion beam sputtering: preliminary results

Thin films of the high-temperature superconductor Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-x/ have been grown in situ by ion beam sputtering from metal binary alloys. The metal binary alloys used were YCu and BaCu. The correct composition of the deposited film was obtained by adjusting the position of the targets with respect to the ion beam. The films were deposited onto heated SrTiO/sub 3/ substrates in oxygen partial pressure. After deposition the samples were slowly cooled to room temperature with a short step at 450 degrees C. The films did not need any further annealing after deposition and showed superconducting properties.