Microstructures and soft magnetic properties of sputtered FeSiAlRuTi films

The soft magnetic properties and microstructure changes in FeSiAlRuTi films due to post annealing treatments were investigated. It was found that the decrease of coercivity and increase of permeability of the films by annealing treatment are correlated to the reduction of dislocation density and formation of DO/sub 3/ superlattice, rather than the grain coarsening or preferred orientation.<
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