Growth and properties of sputtered high-T/sub c/ oxide thin films

Superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ films of thicknesses ranging from 500 AA to 5 mu m have been successfully made by the reactive magnetron sputtering technique. The effects of composition, annealing condition, and thickness of an epitaxial film on its orientation are discussed. films show anisotropic resistivities and critical-current densities that are orientation-dependent.<
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