Spatial resolution limit for the investigation of high-T/sub c/ films by low temperature scanning electron microscopy

Low-temperature scanning electron microscopy represents a promising technique for studying the local superconducting properties of high-T/sub c/ films. The spatial and temporal structure of the electron-beam-induced thermal perturbation of high-T/sub c/ films and the resulting spatial resolution limit are discussed. Typical examples illustrating the imaging technique are presented.<
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